High-transmission windows for UV laser, semiconductor inspection and spectroscopy
| Material | UV Fused Silica (JGS1 / Corning 7980) |
|---|---|
| Transmission Range | 185 nm - 2100 nm |
| Diameter Range | 5 mm - 100 mm |
| Thickness Range | 1 mm - 50 mm |
| Surface Quality | 10-5 (standard) / 20-10 (economy) |
| Surface Flatness | λ/10 @ 632.8 nm (standard) |
| Parallelism | < 30 arc sec |
| CTE | 0.55 ppm/K (extremely low thermal expansion) |
UV fused silica optical windows are fabricated from high-purity synthetic fused silicon dioxide (SiO₂). They offer exceptional optical transmission from the deep ultraviolet (185nm) through the near-infrared (2100nm), making them the most versatile window material for demanding optical systems.
Unlike BK7, UV fused silica does not solarize under prolonged UV exposure, maintaining transmission stability over years of service in UV laser and lithography applications. Its extremely low coefficient of thermal expansion (0.55 ppm/K) ensures dimensional stability under extreme temperature fluctuations.
Select the optimal substrate material based on your wavelength, environment, and budget requirements.
| Material | Transmission | Key Advantage | Considerations |
|---|---|---|---|
| UV Fused Silica (JGS1) | 185-2100nm | Best UV transmission, low CTE, no solarization | Premium cost |
| N-BK7 | 350-2000nm | Low cost, good visible performance | No UV transmission below 350nm |
| Sapphire | 150-5500nm | Extreme hardness (9H), good UV-IR coverage | Birefringent, higher Fresnel loss |
| CaF₂ | 130-7800nm | Broadest transmission, low index, excellent UV | Fragile, moisture sensitive |
Not sure which material to choose?
Ask AI Optical EngineerAnti-reflection optimized for ArF excimer laser wavelength. R < 0.5% per surface.
Typical use: Semiconductor lithography, 193nm laser systems
Anti-reflection for KrF excimer laser. High LIDT coating.
Typical use: UV lithography and UV laser marking
Anti-reflection for third-harmonic Nd:YAG laser. R < 0.25% per surface.
Typical use: UV laser micromachining, fluorescence excitation
Broadband AR from 250nm to 1100nm. Low reflection across UV and visible.
Typical use: Multi-wavelength spectroscopy, fluorescence imaging
Raw fused silica surface. ~4% reflection per surface across transmission band.
Typical use: Non-critical windows or where AR is not required
To select the right coating, please provide: (1) Operating wavelength, (2) Angle of incidence, (3) Required transmission or reflectivity, (4) Laser power density (if applicable), (5) Operating environment.
Key factors to evaluate when specifying this optical component for your system.
UV fused silica transmits from 185nm to 2100nm. For DUV applications (193nm, 248nm), specify synthetic grade (JGS1) for lowest OH absorption.
Fused silica has high intrinsic laser damage threshold. However, coating LIDT is usually the limiting factor. Always specify your laser fluence and pulse duration for proper coating selection.
With CTE of 0.55 ppm/K, fused silica windows exhibit minimal focus shift or stress birefringence under thermal load. This is critical for space-borne and high-power laser applications.
10-5 scratch-dig is recommended for UV laser and imaging applications. For general-purpose windows, 20-10 is acceptable and more economical.
λ/10 is standard for precision applications. For wavefront-critical systems, λ/20 is available. Note that flatness specification directly affects cost.
Fused silica is chemically inert and resistant to most acids. For high-humidity or marine environments, consider hydrophobic coating options.
Protection windows, output couplers, and beam delivery optics for 193nm/248nm/355nm laser systems.
Wafer inspection optics, photolithography subsystems, and cleanroom-compatible windows.
UV-Vis-NIR spectrometer cells, fluorescence measurement windows, and Raman spectroscopy optics.
Confocal microscopy windows, flow cytometry optics, and fluorescence imaging systems.
PhotonEdge supports optical component sourcing, engineering review, and qualified manufacturing through our optical manufacturing network. We coordinate production, coating, and inspection to deliver components that meet your specifications.
Diameter, thickness, focal length verified per specification
Scratch-dig inspection under calibrated illumination
Spectrophotometric measurement of transmission/reflectance
Inspection documentation available according to project requirements. Certificates of Conformance, material test reports, and coating curves can be provided.
The following documentation is available upon request for qualified engineering projects:
CAD & dimensional specs per your requirements
Material properties, transmission curves & certificates
Spectrophotometric measurement data
Surface quality, flatness, centration & dimensional data
CoC with full traceability per project requirements
Application-specific specification documentation
Documentation availability depends on project scope and order quantity. Request details during RFQ.
UV fused silica (JGS1) is synthesized from high-purity silicon tetrachloride, resulting in extremely low metallic impurities and OH content control. This enables deep UV transmission down to 185nm with minimal absorption, which regular fused silica cannot achieve.
UV fused silica (JGS1) has very low solarization resistance compared to standard grades. Under prolonged 193nm or 248nm exposure, some transmission degradation may occur over thousands of hours. For critical applications, discuss solarization-hardened options with our engineering team.
UV fused silica has a softening point of approximately 1683°C and can operate continuously at temperatures up to 1000°C in clean conditions. The low CTE (0.55 ppm/K) means minimal dimensional change across this range.
Yes. UV fused silica is compatible with high vacuum and ultra-high vacuum environments. It has very low outgassing characteristics, making it suitable for space-borne instruments and vacuum chamber viewports.
For UV laser systems, we recommend 10-5 scratch-dig surface quality to minimize scattering losses and laser-induced damage sites. For visible/NIR laser applications, 20-10 is often sufficient.
Yes. We provide coating reflectance curves, LIDT test reports, and environmental durability data with each coated window. All documentation is traceable to the specific batch.
Standard diameters range from 5mm to 100mm. Thicknesses from 1mm to 50mm. Larger sizes and non-standard geometries (rectangular, custom shapes) are available upon request.
Click 'Request Engineering Quote' and provide: material, diameter/shape, thickness, wavelength, surface quality, flatness, coating requirements, and quantity. Our engineering team will respond with a detailed proposal.
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