UV Fused Silica

UV Fused Silica (UVFS) is a high-purity amorphous silica glass with exceptional transmission from the deep UV through the near infrared. Its low coefficient of thermal expansion and high laser damage threshold make it the material of choice for high-power laser and UV applications.

• Excellent deep UV transmission (down to 180nm)
• Exceptionally low thermal expansion (13x lower than BK7)
• Very high laser damage threshold
• Excellent optical homogeneity
• Good chemical durability and resistance
• High thermal shock resistance

• Higher material cost than BK7
• More difficult to process (harder material)
• Higher refractive index temperature coefficient (dn/dT) than some glasses
• Not suitable for mid-IR and far-IR
• Polishing requires diamond tooling

High-power laser systems

UV lithography and inspection

Spectroscopy and analytical instruments

High-precision reference optics

Semiconductor manufacturing equipment